Two new planar coil designs for a high pressure radio frequency plasma source

• 24 April 1995
• journal article
• Published by AIP Publishing in Applied Physics Letters
• Vol. 66  (17) , 2180-2182
• https://doi.org/10.1063/1.113939

Abstract

Keywords

• ELECTRON DENSITY
• HIGH PRESSURE
• HIGH FREQUENCY
• RADIO FREQUENCY