Obtaining a physical two-dimensional Cartesian reference
- 1 November 1997
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 15 (6) , 2173-2176
- https://doi.org/10.1116/1.589347
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- Self-calibration in two dimensions: the experimentPublished by SPIE-Intl Soc Optical Eng ,1996