A real‐time image processing algorithm for visual inspection of semiconductor wafer patterns
- 1 January 1987
- journal article
- research article
- Published by Wiley in Systems and Computers in Japan
- Vol. 18 (10) , 79-89
- https://doi.org/10.1002/scj.4690181008
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- A Method for Automating the Visual Inspection of Printed Wiring BoardsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1980
- An automated mask inspection system—AMISIEEE Transactions on Electron Devices, 1975
- A process for detecting defects in complicated patternsComputer Graphics and Image Processing, 1973