The pyrolytic decomposition of aluminium-tri-sec-butoxide during chemical vapour deposition of thin alumina films
- 15 July 1994
- journal article
- Published by Elsevier in Thermochimica Acta
- Vol. 240, 67-77
- https://doi.org/10.1016/0040-6031(94)87029-2
Abstract
No abstract availableKeywords
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