Silicon-based chlorine sensor with on-wafer deposited chemically anchored diffusion membrane
- 1 November 1992
- journal article
- Published by Elsevier in Analytica Chimica Acta
- Vol. 269 (1) , 75-82
- https://doi.org/10.1016/0003-2670(92)85135-s
Abstract
No abstract availableKeywords
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