Modeling the KrF laser discharge
- 15 June 1976
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 28 (12) , 724-726
- https://doi.org/10.1063/1.88629
Abstract
In this letter we describe modeling of an E‐beam‐controlled discharge operated in gas mixtures containing mainly argon with approximately 10% krypton and a few tenths of a percent fluorine. The discharge physics is dominated by electron impact ionization and excitation of the rare‐gas metastables. The ionization of the metastables impacts the discharge stability directly while their excitation strongly affects the efficiency of pumping KrF*. Predictions of the model are compared with experimental results.Keywords
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