Tandem deposition of small metal particle composites
- 1 October 1986
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 60 (7) , 2548-2552
- https://doi.org/10.1063/1.337119
Abstract
A new method for preparing small metal particle composites (cermets) is described. It consists of many sequential depositions on a substrate of small amounts of a metal and an insulator from separate deposition sources. Under certain conditions, this method provides composites which, for metal volume fractions of less than about 0.5, consist of metal spheres with a very narrow size distribution embedded uniformly in the insulating matrix. In addition to the improved morphology of the composites, the new method also allows, for the first time, for control of metal particle size independent of metal volume fraction.This publication has 8 references indexed in Scilit:
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