Nonlinear vibrations and hysteresis of micromachined silicon resonators designed as frequency-out sensors
- 27 August 1987
- journal article
- Published by Institution of Engineering and Technology (IET) in Electronics Letters
- Vol. 23 (18) , 952-954
- https://doi.org/10.1049/el:19870670
Abstract
Experimental observation of nonlinear vibrations and hysteresis of micromachined silicon resonators is reported. The experimental results are explained using a simple model in which the restoring force acting in the resonator contains a small cubic term. The effects will impose a limit to the maximum amplitude which can be excited while still maintaining reliability of these devices as frequency-out sensors.Keywords
This publication has 0 references indexed in Scilit: