Boron-doped vapor-deposited diamond temperature microsensors
- 30 November 1994
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 45 (2) , 131-137
- https://doi.org/10.1016/0924-4247(94)00830-2
Abstract
No abstract availableKeywords
This publication has 26 references indexed in Scilit:
- Piezoresistive microsensors using p-type CVD diamond filmsSensors and Actuators A: Physical, 1994
- Piezoresistivity in vapor-deposited diamond filmsApplied Physics Letters, 1992
- Techniques for Patterning of CVD Diamond Films on Non‐Diamond SubstratesJournal of the Electrochemical Society, 1991
- Low temperature resistance of p-InSb(Mn)Cryogenics, 1991
- A new method for manufacture of thin film heat flux gaugesShock Waves, 1991
- Narrow-bandgap semiconductor-based thermal sensorsSensors and Actuators A: Physical, 1991
- SiC thin-film thermistorsIEEE Transactions on Industry Applications, 1990
- High precision, rapid readout of cryogenic temperature sensors in the Space Shuttle environmentIEEE Transactions on Instrumentation and Measurement, 1990
- Temperature sensors: New technologies on their way to industrial applicationSensors and Actuators, 1989
- Semiconducting Diamonds as ThermistorsReview of Scientific Instruments, 1960