The effects of PECVD silicon dioxide passivation on the electrical characteristics of Sol-Gel deposited PZT film capacitors
- 1 March 1994
- journal article
- Published by Taylor & Francis in Integrated Ferroelectrics
- Vol. 4 (2) , 155-164
- https://doi.org/10.1080/10584589408018670
Abstract
No abstract availableKeywords
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- Rapid thermal annealing of sol-gel derived lead zirconate titanate thin filmsJournal of Applied Physics, 1992
- The dependence of ferroelectric and fatigue behaviors of PZT films on annealing conditionsIntegrated Ferroelectrics, 1992
- Rochelle Salt as a DielectricPhysical Review B, 1930