Microspacer Electrode Technique
- 1 August 1950
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in Proceedings of the IRE
- Vol. 38 (8) , 871-876
- https://doi.org/10.1109/jrproc.1950.234123
Abstract
A novel technique for obtaining stable and extremely small spacings is reported. Though of possible general usefulness, it is elaborated on from the standpoint of electronics only. Its essential feature is the use of insulating spacers of glass, quartz, or plastic, drawn down from convenient size to microscopic dimensions and combined with metal or semiconductor electrodes. To illustrate some applications, the use of the technique in experimental work is described.Keywords
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