Measurement Of Angle Resolved Light Scattering From Optical Surfaces In The 75 To 750 eV Range

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Abstract
Angle resolved scattering of synchrotron radiation incident on optical surfaces has been measured in the energy range from 75-750 eV. The scattering was measured in the plane of incidence, typically from 3 degrees to at least 40 degrees from the specular direction, with an angle of incidence of 84 degrees from the surface normal. The incident radiation was polarized either parallel or perpendicular to the plane of incidence, but the polarization state of the scattered radiation was not measured. Polished and diamond-turned optical surfaces were studied. The diamond-turned surfaces were turned with an interrupted cut, and measurements were taken with the direction of the grooves both parallel and perpendicular to the plane of incidence. The three diamond-turned surfaces were Cu, electroless Ni on Cu, and electroplated Au on electroless Ni on Cu. The polished samples included evaporated Au on a sapphire substrate.

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