Phonic Desorption
- 1 January 1969
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science and Technology
- Vol. 6 (1) , 214-217
- https://doi.org/10.1116/1.1492663
Abstract
The desorption of materials from the walls of a vacuum vessel by means of phonic energy has been observed. To study this effect and its application to improved pumpdown of nonbakeable systems, an ultrasonic transducer was attached to a small system and the desorption products observed with a quadrupole gas analyzer. Water vapor, CO, CO2, and hydrocarbons were observed to desorb. The apparatus and results are presented with a simple theory that describes the results.Keywords
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