Kinetics of the generation of atomic hydrogen and its adsorption on Si(110)

• 1 January 1977
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science and Technology
• Vol. 14  (1) , 397-399
• https://doi.org/10.1116/1.569217

Abstract

Keywords

• KINETICS
• ATOMIC HYDROGEN
• ADSORPTION ON SI
• GENERATION OF ATOMIC
• HYDROGEN AND ITS ADSORPTION