Abstract: Sputtering of multicomponent metal and semiconductor targets

• 1 March 1979
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science and Technology
• Vol. 16  (2) , 770-771
• https://doi.org/10.1116/1.570081

Abstract

Keywords

• MULTICOMPONENT METAL
• SEMICONDUCTOR TARGETS
• ABSTRACT
• SPUTTERING OF MULTICOMPONENT
• METAL AND SEMICONDUCTOR