Injection molding of polymeric LIGA HARMs

• 17 December 1999
• journal article
• Published by Springer Nature in Microsystem Technologies
• Vol. 6  (2) , 60-66
• https://doi.org/10.1007/s005420050176

Abstract

Keywords

• POLYMER
• MICROSTRUCTURES
• CAVITY
• MOLDING
• FILLING
• HARMS
• STEP
• LIGA
• MICROMETERS
• SPEEDS