Analysis of thin films for industrial applications with a Scanning Auger Microprobe

• 1 January 1987
• journal article
• Published by Springer Nature in Analytical and Bioanalytical Chemistry
• Vol. 329  (2-3) , 190-194
• https://doi.org/10.1007/bf00469135

Abstract

Keywords

• INDUSTRIAL THIN FILM
• SPUTTER DEPOSITED
• SCANNING AUGER
• AUGER MICROPROBE
• SUBLAYER
• AES