Step-and-scan lithography using reduction optics

• 1 November 1989
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B
• Vol. 7  (6) , 1607-1612
• https://doi.org/10.1116/1.584499

Abstract

Keywords

• STEP
• SCAN LITHOGRAPHY USING
• USING REDUCTION OPTICS
• LITHOGRAPHY USING REDUCTION