Reactive Ion Etching Techniques for Silicon Sidewall Angle Control in Microengineering

Publisher Website

1 June 1992

journal article
Published by The Electrochemical Society in Journal of the Electrochemical Society

Vol. 139 (6) , 1700-1705
https://doi.org/10.1149/1.2069480

Abstract

No abstract available

Keywords

REACTIVE ION ETCHING

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