Silicon Planar Devices Using Nitrogen Ion Implantation

• 1 September 1976
• journal article
• Published by IOP Publishing in Japanese Journal of Applied Physics
• Vol. 15  (9) , 1725-1730
• https://doi.org/10.1143/jjap.15.1725

Abstract

Keywords

• ION IMPLANTATION
• USING NITROGEN
• NITROGEN ION
• DEVICES USING
• SILICON PLANAR
• PLANAR DEVICES