A Soft X-Ray Microprobe Using an Axisymmetric Tandem Toroidal Mirror
- 1 October 1987
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 26 (10R)
- https://doi.org/10.1143/jjap.26.1768
Abstract
An axisymmetric tandem toroidal mirror has been designed and fabricated for a soft X-ray microprobe. We present the design as well as the focusing characteristics, evaluated by a ray trace procedure. The mirror has been used with an AlKα (λ=8.34Å) source to produce demagnified images and to form a microprobe for soft X-ray scanning microscopy. We present these results and their analysis.Keywords
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