Formation of compound semiconductors by electrochemical atomic layer epitaxy

• 1 July 1992
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology A
• Vol. 10  (4) , 886-891
• https://doi.org/10.1116/1.577689

Abstract

Keywords

• ATOMIC LAYER
• ELECTROCHEMICAL ATOMIC
• LAYER EPITAXY
• COMPOUND SEMICONDUCTORS
• FORMATION OF COMPOUND