Pulsed laser annealing of GaAs implanted with Se and Si

• 1 January 1990
• journal article
• Published by SPIE-Intl Soc Optical Eng in Optical Engineering
• Vol. 29  (4) , 329-338
• https://doi.org/10.1117/12.55603

Abstract

Keywords

• ANNEALING
• GALLIUM ARSENIDE
• LASERS