Spectral infrared absorption of CMOS thin film stacks
- 1 January 1999
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- No. 10846999,p. 106-111
- https://doi.org/10.1109/memsys.1999.746780
Abstract
We report the measurement of the relative spectral infrared absorptance of a complete set of CMOS thin film stacks. The measurements were made in the spectrum from 2 /spl mu/m to 14.6 /spl mu/m. The thin film stacks are used in micromachined thermal infrared sensors. The presented data allow more precise modeling of these sensors.Keywords
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