Role of AlN/GaN Multilayer in Crack-Free GaN Layer Growth on 5”φ Si (111) Substrate
- 26 November 2004
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 43 (No. 12B) , L1595-L1597
- https://doi.org/10.1143/jjap.43.l1595
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