New Wet Cleaning Strategies for Obtaining Highly Reliable Thin Oxides
- 24 October 1993
- journal article
- Published by Springer Nature in MRS Proceedings
- Vol. 315 (1) , 35-45
- https://doi.org/10.1557/proc-315-35
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Dependence of thin-oxide films quality on surface microroughnessIEEE Transactions on Electron Devices, 1992
- Behavior of Defects Induced by Metallic Impurities on Si(100) SurfacesJapanese Journal of Applied Physics, 1989