Finite Element Method Analysis of a Shear Horizontal Wave Guided in a Piezoelectric Plate

Abstract
The finite element method (FEM) is applied to analyse a shear horizontal (SH) wave in a PZT plate guided by conductive thin films. The FEM analysis is superior to Tiersten's approximate procedure in such a way that the magnitudes of elastic displacement ui and electric potential can be obtained completely over a cross-section of a sample. The error in the velocity of a straight-crested SH wave calculated by the FEM analysis is estimated to be 0.004% and 0.3% for plates with free and metallized surfaces, respectively, when a wave number multiplied by half the thickness of the plate is 10. The dispersion curves for the lowest and second lowest SH modes, and the flexural and longitudinal modes are calculated by the FEM analysis. Optimum conditions for a waveguide with small dispersion, strong energy confinement, low loss and small-distortion are discussed by making use of the calculated dispersion curves and magnitudes of ui, and .

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