Characteristics of Microwave Plasma Observed by Spectroscopic and Mass Spectrometric Methods

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Abstract
The plasma light source operated in the standing wave mode are analyzed experimentally by using two methods. One is the spectroscopic method, and the other is the mass spectrometric method. Using the former method we can identify the several lines in the vacuum ultraviolet regions. There are the resonance lines and the emission lines for the carrier gas. For example, the emission lines of Ar V at 524 Å, Ar VII at 462 Å and He II at 304 Å are generated from the argon and the helium plasma operated in the standing wave mode. On the other hand, the resonance lines of Ar I at 1048 Å and He I at 584 Å are generated from the plasma without the standing wave mode. Using the latter method, we can observe the mass spectrum of organic compounds irradiated with the resonance line and the emission line. In order to use as a light source of the mass spectrometer, the optimum operated conditions are determined as a function of the carrier gas pressure.