Novel Fluoropolymers for Use in 157nm Lithography.

• 1 January 2001
• journal article
• Published by Technical Association of Photopolymers, Japan in Journal of Photopolymer Science and Technology
• Vol. 14  (4) , 583-593
• https://doi.org/10.2494/photopolymer.14.583

Abstract

Keywords

• QUARTZ CRYSTAL MICROBALANCE