IR laserinduced thermolysis and UV laserinduced photolysis of 1,3diethyldisiloxane: chemical vapour deposition of nanotextured hydridoalkylsilicones
- 1 May 2001
- journal article
- research article
- Published by Royal Society of Chemistry (RSC) in Journal of Materials Chemistry
- Vol. 11 (6) , 1557-1562
- https://doi.org/10.1039/b008437i
Abstract
IR laser thermolysis and UV laser photolysis of gaseous 1,3-diethyldisiloxane proceed via different mechanisms: the former involves 1,1-H2 and ethene elimination, whereas the latter is dominated by 1,1-H2 and ethane elimination. The difference plays an important role in determining the composition of the solid nanotextured films deposited from the gas phase.Keywords
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