A Model for Low-Resistivity TiSi2 Formation on Narrow Polysilicon Lines.
- 1 January 1994
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- The C49 to C54 Phase Transformation in TiSi2 Thin FilmsJournal of the Electrochemical Society, 1994