The radial flow planetary reactor: low pressure versus atmospheric pressure MOVPE
- 1 December 1991
- journal article
- Published by Elsevier in Journal of Crystal Growth
- Vol. 115 (1-4) , 203-210
- https://doi.org/10.1016/0022-0248(91)90739-r
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- MOVPE grown high performance 0.25 μm AlGaAs/InGaAs/GaAs pseudomorphic MODFETsJournal of Crystal Growth, 1991
- Layer uniformity in a multiwafer MOVPE reactor for III–V compoundsJournal of Crystal Growth, 1991
- A new versatile, large size MOVPE reactorJournal of Crystal Growth, 1988
- A New Method for Growing GaAs Epilayers by Low Pressure OrganometallicsJournal of the Electrochemical Society, 1979