Electrical and Optical Properties of Boron Doped Amorphous Si Prepared by CVD Method

• 1 October 1978
• journal article
• Published by IOP Publishing in Japanese Journal of Applied Physics
• Vol. 17  (10) , 1897-1898
• https://doi.org/10.1143/jjap.17.1897

Abstract

Keywords

• CVD
• ELECTRICAL AND OPTICAL PROPERTIES
• DOPED AMORPHOUS
• SI PREPARED
• AMORPHOUS SI
• BORON DOPED