Fabrication of nonlinearly shaped optical waveguide tapers on InP with precise design-parameter control
- 1 November 1992
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 10 (6) , 2979-2983
- https://doi.org/10.1116/1.585956
Abstract
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