Abstract
The crystal quality of CdTe layers grown on single‐crystalline CdS by chemical vapor deposition is evaluated. Different x‐ray techniques have been applied to investigate the crystal perfection and defects. Good CdTe layers grow in the sphalerite phase with strong twinning about the [111̄] growth direction. No mixture of cubic and hexagonal phases, polytypes, stacking faults, and fiber texture are observed. Imperfect layers contain polycrystalline areas.