A tuned Langmuir probe for measurements in rf glow discharges
- 1 June 1990
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 67 (11) , 6718-6727
- https://doi.org/10.1063/1.345109
Abstract
No abstract availableThis publication has 17 references indexed in Scilit:
- Multichannel boxcar-averaged measurements of plasma parameters made using a digital storage scopeReview of Scientific Instruments, 1988
- Langmuir probe characteristics in RF glow dischargesPlasma Chemistry and Plasma Processing, 1988
- An electrostatic probe technique for RF plasmaJournal of Physics E: Scientific Instruments, 1987
- Electrical measurements of RF-generated plasmas using a driven electrostatic probe techniqueJournal of Physics D: Applied Physics, 1987
- Use of electric probes in silane radio frequency dischargesJournal of Applied Physics, 1983
- The use of electrostatic probes for plasma diagnostics?A reviewPlasma Chemistry and Plasma Processing, 1982
- The behaviour of electrostatic double probes in plasmas with high-amplitude RF fieldsJournal of Physics D: Applied Physics, 1978
- Measurement of plasma discharge characteristics for sputtering applicationsJournal of Vacuum Science and Technology, 1978
- Effect of a R.F, signal on the characteristic of a langmuir probeIl Nuovo Cimento (1869-1876), 1963
- Notes on the Effect of Noise on Langmuir Probe CharacteristicsProceedings of the Physical Society, 1962