Thermal desorption of implanted inert gas ions from nickel
- 1 January 1975
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science and Technology
- Vol. 12 (1) , 476-480
- https://doi.org/10.1116/1.568566
Abstract
The thermal desorption spectra of low−energy inert gas ions implanted into a nickel crystal are reported. Particularly simple, surface sensitive, first−order desorption transients are obtained at low−implantation energies and at low−incident doses. Desorption rate constants are derived for one of the well−resolved desorption transients and allow a comparison of theoretical peak profiles with the experimental measurement. A diffusion process is observed for the desorption of high−energy (1−7 keV) neon in nickel and the activation energy for neon diffusion in nickel is obtained.Keywords
This publication has 0 references indexed in Scilit: