Reactively Sputter-Deposited Titanium Oxide Coatings with Parallel Penniform Microstructure

• 1 March 2000
• journal article
• research article
• Published by Wiley in Advanced Materials
• Vol. 12  (5) , 341-343
• https://doi.org/10.1002/(sici)1521-4095(200003)12:5<341::aid-adma341>3.0.co;2-0

Abstract

Keywords

• ELECTROCHEMISTRY
• PARALLEL PENNIFORM STRUCTURE
• PATTERNED MICROSTRUCTURES
• SPUTTER DEPOSITION
• TITANIUM OXIDE