High density contactless, self aligned EPROM cell array technology
- 1 January 1986
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- p. 592-595
- https://doi.org/10.1109/iedm.1986.191259
Abstract
A revolutionary EPROM cell technology has been developed. Its suitability to realize high density memories with performance and reIiability comparable to the conventional EPROMS has been demonstrated with a 64K bit density vehicle. This self-aligned contactless cell is in a crosspoint array configuration, and occupies 33 percent less area than a conventional cell at comparable design rules. The planar, contactless technology has enhanced manufacturability, scalability and is ideally suited for memories beyond megabit density.Keywords
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