Internal stress in thin films prepared by ion beam and vapor deposition
- 31 August 1994
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 66 (1-3) , 310-312
- https://doi.org/10.1016/0257-8972(94)90019-1
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Crystallization of carbon films by ion beam assist technologyNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1988
- Internal stresses in Cr, Mo, Ta, and Pt films deposited by sputtering from a planar magnetron sourceJournal of Vacuum Science and Technology, 1982
- Stresses Developed in Optical Film CoatingsApplied Optics, 1966