Scanning tunneling microscope combined with a scanning electron microscope
- 1 February 1986
- journal article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 57 (2) , 221-224
- https://doi.org/10.1063/1.1138973
Abstract
We have developed a small scanning tunneling microscope (STM) to be incorporated into a scanning electron microscope (SEM). Vibration isolation and damping is achieved solely with Viton dampers. As a stand‐alone unit, a tunnel‐gap stability of about 1 Å is reached at atmospheric air pressure without additional sound protection. Stability improves by at least an order of magnitude when incorporated into a SEM.Keywords
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