Preferential Etching of InP for Submicron Fabrication with HCl / H 3 PO 4 Solution
- 1 March 1985
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 132 (3) , 671-673
- https://doi.org/10.1149/1.2113927
Abstract
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