Use of Au-In-Pd and Pd-In Electroless Deposits for Ohmic Contacts on n-GaAs

Abstract
Codeposition of gold‐palladium‐indium and palladium‐indium alloys onto substrates is obtained in an acidic medium by the electroless method. The preparation and characteristics of the different baths are presented. For the Pd‐In alloys, a crystalline refractory compound is initially formed, whereas after a 2 min annealing treatment at 470°C traces of and are found. A high‐quality ohmic contact having is obtained with annealing.

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