Low Stress, High Resolution Photosensitive Polyimide Based on a BPDA/PDA/6FDAm Copolymer
- 1 January 1993
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
A novel series of BPDA/PDA/6FDAm polyimide copolymers have been developed. These materials are more flexible, soluble, and more optically transparent than the homopolymer BPDA/PDA. A negative acting PSPI has been developed based on one of these copolymers. This PSPI exhibits high resolution. 6 μm lines can be delineated in a 19 μm thick film. In addition, the PSPI exhibits high performance mechanical/physical properties such as a low CTE, low stress, and high elongation at break.Keywords
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