Electron beam blanking systems
- 1 January 1983
- Vol. 5 (1) , 3-13
- https://doi.org/10.1002/sca.4950050102
Abstract
Electron beam blanking in the scanning electron microscope (SEM) by deflection over a chopping aperture is reviewed. The first part is concerned with electron beam deflection structures and driving methods, the second part with electron optics of deflection blanking systems in the SEM.Keywords
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