Fabrication of silicon field emitters by forming porous silicon

• 1 May 1996
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 14  (3) , 1906-1909
• https://doi.org/10.1116/1.588952

Abstract

Keywords

• POROUS SILICON
• FORMING POROUS
• SILICON FIELD
• FIELD EMITTERS
• FABRICATION OF SILICON