Low Loss 0.9-1.9 GHz SAW Filters with Submicron Finger Period Electrodes

• 1 January 1980
• proceedings article
• Published by Institute of Electrical and Electronics Engineers (IEEE)
• p. 371-376
• https://doi.org/10.1109/ultsym.1980.197422

Abstract

Keywords

• SAW FILTERS
• FINGERS
• ELECTRODES
• ION BEAMS
• SPUTTER ETCHING
• FABRICATION
• INSERTION LOSS
• ELECTRON BEAMS
• RESISTS
• BAND PASS FILTERS