Low energy Ar ion bombardment damage of Si, GaAs, and InP surfaces
- 31 January 1982
- journal article
- Published by Elsevier in Solid State Communications
- Vol. 41 (2) , 153-156
- https://doi.org/10.1016/0038-1098(82)91056-0
Abstract
No abstract availableThis publication has 13 references indexed in Scilit:
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