Influence of Water on Time-Delay Problem in a Chemically Amplified Resist.

• 1 January 1994
• journal article
• Published by Technical Association of Photopolymers, Japan in Journal of Photopolymer Science and Technology
• Vol. 7  (3) , 501-506
• https://doi.org/10.2494/photopolymer.7.501

Abstract

Keywords

• TIME DELAY
• CHEMICALLY AMPLIFIED
• AMPLIFIED RESIST
• DELAY PROBLEM
• INFLUENCE