Voltage controlled monolithic s.a.w. phase shifter using m.z.o.s. structure
- 25 September 1980
- journal article
- Published by Institution of Engineering and Technology (IET) in Electronics Letters
- Vol. 16 (20) , 777-778
- https://doi.org/10.1049/el:19800551
Abstract
A monolithic surface-acoustic-wave (s.a.w.) phase shifter, fabricated with sputtered zinc oxide on an oxidised n silicon substrate, is demonstrated. Almost 67° of voltage controlled phase shift is achieved in 200 acoustic wavelengths of interaction region at 214 MHz.Keywords
This publication has 0 references indexed in Scilit: